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Ultapure Water System 
Case Study

In advanced electronics manufacturing, high-purity water is critical to process reliability. We engineer custom Ultrapure Water (UPW) systems tailored to your specific feed water conditions, ensuring stable operation, strict compliance, and optimized production yields for high-tech industries.

Ultrapure Water (UPW):

Driving High-Yield Semiconductor Manufacturing

Ultrapure water (UPW) represents the highest standard of water purification, treated to remove virtually all dissolved solids, organics, gases, and particulates. As semiconductor technology advances and wafer circuits become increasingly intricate, the demand for ultra-high-purity cleaning water has grown critical. Engineered to achieve a resistivity of $18.2\,\text{M}\Omega\cdot\text{cm}$, ultrapure water is completely non-conductive, making it indispensable for precise microelectronics manufacturing and critical industrial processes.
 

Our industrial UPW systems are essential across high-tech sectors, including:

  • Semiconductor & Microelectronics Manufacturing

  • Pharmaceutical & Life Sciences Industries

  • Advanced Laboratory & Research Facilities

  • Chemical Processing & Power Generation

Core Technologies for Ultrapure Water Systems


The manufacture of ultrapure water has different water quality requirements depending on the product. The core technology of ultrapure water manufacturing technology, includes ion exchange technology, Membrane filtration technology, piping technology, and analysis technology.

惠州康惠电子30TPH RO+EDI

惠州康惠电子30TPH RO+EDI

Foxccon_Complete

Foxccon_Complete

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P1040888_edited

水處理設備廣告-一中工業

水處理設備廣告-一中工業

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DSC03823_edited

CASE 1:

12 CMH Ultrapure Water (UPW) System for Semiconductor Manufacturing

Project Overview

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Semiconductor manufacturing plants demand high-standard Ultrapure Water (UPW) for critical wafer fabrication processes, requiring a strict resistivity standard of 18.2 MΩ·cm. To eliminate impurities. To address this need, we engineered and deployed a high-efficiency 12 CMH Ultrapure Water System. Integrating cutting-edge industrial water treatment processes—such as pretreatment, Reverse Osmosis (RO), and Electrodeionization (EDI)—the system reliably delivers high-purity water with a resistivity exceeding 10 MΩ·cm.

Performance & Results​​
1. Stable Water Quality Purity

The system reliably delivers an output water resistivity of $10\,\text{M}\Omega\cdot\text{cm}$, fully meeting the high-purity semiconductor industry water standards.

2. Reliable System Operation

Our robust industrial water system engineering ensures exceptionally stable operation, minimal downtime, and simplified maintenance.

3. Optimized Cost Control

Seamlessly balancing capital expenditures with operational and maintenance costs, this solution maximizes ROI and overall cost-efficiency.

International Water Quality Standards & Specifications

Industry Purity Standards for Laboratory & Electronic Grade Water

 

  • Table 1 (Left): NCCLS Water Quality Standards for Clinical Laboratories

  • Table 2 (Middle): ASTM D1193 Standard Specification for Reagent Grade Water

  • Table 3 (Right): ASTM D5127 Standard Guide for Electronic Grade Water

American Society for Testing and Materials-2
American Society for Testing and Materials-3
American Society for Testing and Materials-1
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